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RF MEMS
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RF MEMS
Encyclopedia
工学
微纳器件
释
radio frequency MEMS; RF MEMS
射频微机电系统
运用微机电系统(micro electro-mechanical system,MEMS)技术,利于从低频直到红外以下频段信号,产生与处理的微型化和可集成的器件和系统。
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