“resonant micro-electromechanical system pressure sensor”的概念、定义、翻译、参考文献-科学参考

单词	resonant micro-electromechanical system pressure sensor
释义	resonant micro-electromechanical system pressure sensor Encyclopedia 工学微电子机械系统释 resonant micro-electromechanical system pressure sensor谐振式微电子机械系统压力传感器将微机电加工技术和机械谐振式传感技术有机结合而制成的压力传感器。
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