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reactive sputtering
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reactive sputtering
Encyclopedia
工学
溅射工艺
释
reactive sputtering
反应溅射
具有一定能量的氩离子(Ar+)溅射金属或合金靶表面,被溅射出的金属原子和反应气体发生化学反应,在基体上形成化合物薄膜的技术。
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