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rapid thermal oxidation
释义
rapid thermal oxidation
Encyclopedia
工学
硅热氧化工艺
释
rapid thermal oxidation
快速热氧化
在极短的时间内通过快速升降温在高温下实现硅表面迅速热氧化的半导体制造工艺技术。是快速热处理工艺之一。
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control of legal metrology
control of material structure by ion beam implantation
control of medical insects
control of network
control of output ratio
control of pollution from ships
control of structures with smart electromagnetic materials
Control of the Pest Grasses and Weeds in Rangeland
control of the relation between words
control of ventilation
control of waste gas
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control over network
control over network; network-based control
control panel
control parameter
control parameterization
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control point coordinate
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control points
control pole modulation
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