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rapid thermal anneal
释义
rapid thermal anneal
Encyclopedia
工学
杂质扩散工艺
释
rapid thermal anneal
快速热退火
在极短的时间内,通过快速升降温在高温下实现半导体材料掺杂激活与缺陷修复的半导体制造工艺技术。是一种快速热处理工艺。
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mean solar time
mean space
mean speed
mean speed of gas molecular relative motion
mean spherical approximation
mean spheroid
mean square
mean-square approximation
mean-square consistent estimator
mean-square contingency
mean-square continuous
mean-square convergence
mean square density fluctuation
mean squared error
mean square deviation
mean-square deviation
mean-square differentiation
mean square displacement
mean square end to end distance
mean square end-to-end distance
mean-square end-to-end distance
mean square ergodic theorem
mean-square ergodic theorem
mean square error
mean-square error
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