“radio frequency micro-electromechanical system filter”的概念、定义、翻译、参考文献-科学参考

单词	radio frequency micro-electromechanical system filter
释义	radio frequency micro-electromechanical system filter Encyclopedia 工学微电子机械系统释 radio frequency micro-electromechanical system filter射频微电子机械系统滤波器基于微电子机械系统（micro-electromechanical system; MEMS）加工技术所制备的微尺度滤波器件。
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