“radio frequency MEMS”的概念、定义、翻译、参考文献-科学参考

单词	radio frequency MEMS
释义	radio frequency MEMS Encyclopedia 工学微纳器件释 radio frequency MEMS; RF MEMS射频微机电系统运用微机电系统（micro electro-mechanical system，MEMS）技术，利于从低频直到红外以下频段信号，产生与处理的微型化和可集成的器件和系统。
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