“pulsed metal-organic chemical vapor deposition”的概念、定义、翻译、参考文献-科学参考

单词	pulsed metal-organic chemical vapor deposition
释义	pulsed metal-organic chemical vapor deposition Encyclopedia 工学半导体外延生长释 pulsed metal-organic chemical vapor deposition脉冲式金属有机化合物气相沉积将Ⅲ族金属有机化合物与Ⅴ族氢化物或烷基化合物，以脉冲相间隔交替的方式通入化学沉积系统反应室，在高温反应室中分解并在衬底上沉积生成化合物的技术。简称PMOCVD。
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