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back scattering-channeling effect
释义
back scattering-channeling effect
Encyclopedia
工学
[表面测量]
释
back scattering-channeling effect
背散射-沟道效应
让一束单能的带电粒子(4He+或1H+)入射到样品上,利用它与样品表面层原子核的相互作用来分析该薄层的厚度、组分、杂质种类、含量及其分布等的技术。
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