“polymer MEMS”的概念、定义、翻译、参考文献-科学参考

单词	polymer MEMS
释义	polymer MEMS Encyclopedia 工学微纳器件释 polymer micro electro mechanical system; polymer MEMS聚合物微机电系统在聚合物材料的基础上，应用微加工技术制造的各种传感器、执行器以及微系统的总称。
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