“plasma sputtering”的概念、定义、翻译、参考文献-科学参考

单词	plasma sputtering
释义	plasma sputtering Encyclopedia 工学半导体薄膜制备释 plasma sputtering等离子体溅射利用真空室中的稀有气体通过辉光放电产生的等离子体轰击靶材，使其原子溅射出来，落在镀件表面形成薄膜的物理气相淀积技术。
随便看	pressure-induced spectrum pressure-induced structral phase transtion pressure-induced superconducting phase transition pressure inflow condition pressure ionization pressure jump pressure leach pressure leaf filter pressureless compacting pressureless sintering of ceramic matrix composites pressureless sintering of ceramics pressure limit pressure limiting device pressure logging device pressure loss pressure lubrication pressure measurement pressure measuring instrument pressure mechanical processing safety pressure medium pressure meter test pressuremeter test pressure modulation method pressure monitoring pressure of fan

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