“plasma sputtering”的概念、定义、翻译、参考文献-科学参考

单词	plasma sputtering
释义	plasma sputtering Encyclopedia 工学半导体薄膜制备释 plasma sputtering等离子体溅射利用真空室中的稀有气体通过辉光放电产生的等离子体轰击靶材，使其原子溅射出来，落在镀件表面形成薄膜的物理气相淀积技术。
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