“plasma sputtering”的概念、定义、翻译、参考文献-科学参考

单词	plasma sputtering
释义	plasma sputtering Encyclopedia 工学半导体薄膜制备释 plasma sputtering等离子体溅射利用真空室中的稀有气体通过辉光放电产生的等离子体轰击靶材，使其原子溅射出来，落在镀件表面形成薄膜的物理气相淀积技术。
随便看	adaptive interference suppression adaptive intermolecular reactive bond order adaptive intermolecular reactive bond order, AIREBO potential adaptive kalman filtering adaptive landscape adaptive LASSO adaptive learning adaptive learning environment adaptive least absolute shrinkage and selection operator adaptive machine translation adaptive machining adaptive maintenance adaptive maintenance of information system adaptive management adaptive management strategy adaptive market hypothesis adaptive mesh adaptive mesh generation adaptive mesh refinement adaptive method adaptive modulation coded，AMC adaptive modulation hypothesis adaptive neural network adaptive optical system adaptive optics

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