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phase-shifting mask plasmonic imaging lithography
释义
phase-shifting mask plasmonic imaging lithography
Encyclopedia
工学
等离子体成像光刻
释
phase-shifting mask plasmonic imaging lithography
相移掩膜等离子体成像光刻
利用相移掩模技术,提高等离子体成像光刻分辨力的等离子体成像光刻技术。
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