“on-line aberration”的概念、定义、翻译、参考文献-科学参考

单词	on-line aberration
释义	on-line aberration Encyclopedia 工学光刻机测量系统释 on-line aberration在线波像差检测基于曝光显影后的图像形状改变、空间像的位置改变，波前相位直接探测原理而进行的波像差测量方法。该测量直接在光刻机上进行，可定义为在线波像差测量系统。
随便看	cylinders Cylinder Seal of West Asia cylinder set cylinder sigma-algebra cylinder-sphere intersection cylinder surface cylinder theorem cylinderuria cylinder valve cylinder wire cylindrical cylindrical algebra cylindrical algebraic decomposition cylindrical bale pickup loader cylindrical congruence cylindrical construction cylindrical coordinate cylindrical coordinates system cylindrical coordinate system cylindrical curve cylindrical decomposition cylindrical domain cylindrical electrode cylindrical equal-area projection cylindrical equation

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