“on-line aberration”的概念、定义、翻译、参考文献-科学参考

单词	on-line aberration
释义	on-line aberration Encyclopedia 工学光刻机测量系统释 on-line aberration在线波像差检测基于曝光显影后的图像形状改变、空间像的位置改变，波前相位直接探测原理而进行的波像差测量方法。该测量直接在光刻机上进行，可定义为在线波像差测量系统。
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