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单词
on-line aberration
释义
on-line aberration
Encyclopedia
工学
光刻机测量系统
释
on-line aberration
在线波像差检测
基于曝光显影后的图像形状改变、空间像的位置改变,波前相位直接探测原理而进行的波像差测量方法。该测量直接在光刻机上进行,可定义为在线波像差测量系统。
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