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OMCVD
释义
OMCVD
Encyclopedia
理学
金属有机化学气相沉积
释
metal-organic chemical vapor deposition; MOCVD; MOVPE; OMVPE; OMCVD
金属有机物化学气相沉积
利用有机金属热分解反应进行气相外延生长薄膜的化学气相沉积技术。
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