“atomic layer epitaxy”的概念、定义、翻译、参考文献-科学参考

单词	atomic layer epitaxy
释义	atomic layer epitaxy Encyclopedia 工学半导体外延生长释 atomic layer epitaxy原子层外延把金属与非金属的两种不同气体原子或化合物分子分别交替循环地化学吸附在衬底上（每交替循环吸附一次即可生长一层单原子层），从而生长出一定厚度外延膜的技术。简称ALE。是T.森托拉发展起来的技术。
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