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atomic layer epitaxy
释义
atomic layer epitaxy
Encyclopedia
工学
半导体外延生长
释
atomic layer epitaxy
原子层外延
把金属与非金属的两种不同气体原子或化合物分子分别交替循环地化学吸附在衬底上(每交替循环吸附一次即可生长一层单原子层),从而生长出一定厚度外延膜的技术。简称ALE。是T.森托拉发展起来的技术。
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method of equating coefficients
method of equivalent nonlinear system
method of estimation
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method of Euclidean construction
method of exclusion
method of exhaustion
method of exhaustion; exhausting (bruteforce) method
method of extensions and restrictions
method of exterior forms
method of extremal metric
method of failure assessment diagram
method of false position
method of feasible directions
method of finite differences
method of finite elements
method of fluxions
method of forcing
method of fractional steps
method of frozen coefficients
method of garden design
method of gradient
method of harmonic balance
method of heavy sphere
method of higher power finite differences
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