“atomic layer deposition”的概念、定义、翻译、参考文献-科学参考

单词	atomic layer deposition
释义	atomic layer deposition Encyclopedia 工学【半导体工艺技术】释 atomic layer deposition原子层沉积技术将物质以单原子膜形式分层镀在基底表面的技术。工学薄膜沉积释 atomic layer deposition; ALD原子层沉积可以将物质以单原子膜形式一层一层地镀在基底表面的方法。 Physics 凝聚态物理学结构 atomic layer deposition原子层沉积
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