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NEMS sensor
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NEMS sensor
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工学
温度传感器
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NEMS sensor
NEMS传感器
特征尺寸在1~100纳米,以机电结合为主要特征,采用纳米级电子和纳米级机械加工技术制造,以纳米级结构所产生的新效应(量子效应、界面效应和纳米尺度效应)为工作特征的新型传感器。全称纳机电系统(nano-electromechanical system; NEMS)传感器。
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