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multiple-domain coupling analysis for MEMS
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multiple-domain coupling analysis for MEMS
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﹝微纳设计与仿真﹞
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multiple-domain coupling analysis for MEMS
微机电系统多域耦合分析
针对微机电系统开展的多个物理场之间交互作用的数值计算分析过程。又称多物理场耦合分析。
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