“multi-function integrated micro-electromechanical system sensor”的概念、定义、翻译、参考文献-科学参考

单词	multi-function integrated micro-electromechanical system sensor
释义	multi-function integrated micro-electromechanical system sensor Encyclopedia 工学微电子机械系统释 multi-function integrated micro-electromechanical system sensor多功能集成微电子机械系统传感器利用集成电路技术工艺和微机械加工方法将基于各种物理效应的机电敏感元器件和处理电路集成在一个芯片上，实现多参数测量的传感器。
随便看	support of a generalized function support of a homotopy support of a hyperfunction support of a measure support of a module support of an algebra support of an analytic functional support of an interpretation support of a pencil support of a prime end support of a section of a sheaf support of a singular simplex support of a spectral measure support of distribution support of fundamental function support of measure support of the divisor support planning of aircraft materiel support point support program support reactions support requirements of aircraft materiel support resonance support resource of aircraft materiel support ring

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