“multi-function integrated micro-electromechanical system sensor”的概念、定义、翻译、参考文献-科学参考

单词	multi-function integrated micro-electromechanical system sensor
释义	multi-function integrated micro-electromechanical system sensor Encyclopedia 工学微电子机械系统释 multi-function integrated micro-electromechanical system sensor多功能集成微电子机械系统传感器利用集成电路技术工艺和微机械加工方法将基于各种物理效应的机电敏感元器件和处理电路集成在一个芯片上，实现多参数测量的传感器。
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