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multi-function integrated micro-electromechanical system sensor
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multi-function integrated micro-electromechanical system sensor
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工学
微电子机械系统
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multi-function integrated micro-electromechanical system sensor
多功能集成微电子机械系统传感器
利用集成电路技术工艺和微机械加工方法将基于各种物理效应的机电敏感元器件和处理电路集成在一个芯片上,实现多参数测量的传感器。
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