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multi-function integrated micro-electromechanical system sensor
释义
multi-function integrated micro-electromechanical system sensor
Encyclopedia
工学
微电子机械系统
释
multi-function integrated micro-electromechanical system sensor
多功能集成微电子机械系统传感器
利用集成电路技术工艺和微机械加工方法将基于各种物理效应的机电敏感元器件和处理电路集成在一个芯片上,实现多参数测量的传感器。
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backflow
backflow [effect]
backflow effect
backflush
back flushing
back focal distance
back focal plane
back focus
back focus length
back formation
backgammon
backgammon set
backgear
background
background absorption
Background Air Pollution Monitoring Network
background board
background brightness
background check
background cloth paper and desk
background Compton scattering
background continuum
background correction
background count
background current
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