“multi-function integrated micro-electromechanical system sensor”的概念、定义、翻译、参考文献-科学参考

单词	multi-function integrated micro-electromechanical system sensor
释义	multi-function integrated micro-electromechanical system sensor Encyclopedia 工学微电子机械系统释 multi-function integrated micro-electromechanical system sensor多功能集成微电子机械系统传感器利用集成电路技术工艺和微机械加工方法将基于各种物理效应的机电敏感元器件和处理电路集成在一个芯片上，实现多参数测量的传感器。
随便看	vibration-rotation spectrum vibration-sensitive receptor vibration sensor vibration severity vibration signal processing vibration spectrum vibration sputum elimination vibration system vibration technique vibration temperature vibration test vibration testing technology Vibration Theory on Basilar Membrane vibration transmission ratio vibration wheel silicon micro gyroscope vibrato vibratode vibrator vibrator source controller vibratory vibratory compactor vibratory feeder vibratory inverter vibratory pile hammer vibratory polishing

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