“micro opto-mechanical focal plane array”的概念、定义、翻译、参考文献-科学参考

单词	micro opto-mechanical focal plane array
释义	micro opto-mechanical focal plane array Encyclopedia 工学微纳结构释 micro opto-mechanical focal plane array；FPA微光机械焦平面阵列由双材料微悬臂梁排布而成的二维阵列。又称双材料微悬臂梁式焦平面阵列。焦平面阵列简称FPA。
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