“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	microscopic physics microscopic physics, microphysics microscopic quantitative of crude drug microscopic quantity microscopic Raman spectrometry microscopic reaction kinetics microscopic reversibility microscopic scale microscopic state microscopic state, microstate microscopic state numbers microscopic structure microscopic theory of multiferroics microscopic theory of superconductivity microscopic traffic flow simulation Microscopium microscopy microscopy for phar- maceutical analysis micro seafloor electrical field receiver microsecond microsecond plasma microsecond pulsar microsecond pulse microsection of crude drug microseism

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