“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	system design system design of micro electro-mechanical system，system design of MEMS system design report system detailed investigation system determinant system development system development life cycle system development life cycle, SDLC system diagram system directory system distribution system documentation system dynamics analysis system dynamics method system dynamics model system dynamics simulation system efficiency system engineering system engineering for science and technology system environment Systeme Preparatoire Infra-Rouge Pour Alerte satellite system equivalence system error system estimation system evaluation

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