“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	three perching egrets three-person keelboat of Summer Paralympics three-phase three phase AC power transmission three-phase A.C.voltage regulating circuit three-phase a.c. voltage source three-phase alternating current three-phase boundary three-phase carbon arc lamp three-phase CCD three-phase commitment protocol three-phase contact line three phase current three phase electronic watt hour meter three-phase five-wire system three-phase flow three phase four wire system three-phasefour-wire system three-phase froth three phase full wave rectified automatic magnetic particle test equipment three phase induction meter three-phase induction motor three-phase loads three phase power three-phase relative permeability

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