“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	single phase induction meter single phase solidification single phase static meter single-phase system single photon camera single photon detection single-photon detector single photon emission computed tomography single-photon emission computed tomography single photon emission computed tomography/computed tomography single photon emission computed tomography pharmaceutical single photon emission computed tomography (SPECT) single photon emission computed tomography, SPECT single-photon emission computed tomography，SPECT single photon infrared detector single-photon interference single photon metrology technique single-photon source [single-photon] turnstile single-photon turnstile single photo space resection single-piece note hidden in the congratulation letter single piece production single pipeline single pipe oil gathering process

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