“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	nonuniform rational B-spline curve non-uniform rational Bspline curve and surface nonuniform rational Bspline curve and surface non-uniform rational B-spline, NURBS non-uniform rational Bspline surface nonuniform rational B-spline surface nonuniform rational Bspline surface non-uniform universe non-unimodular nonunion of fracture non-uniqueness non-uniqueness of Lagrangian non-uniqueness theorem non-unique solution non-unit non-unital left module non-unital module non-unital right module non-unitarity non-unitary operator non-unitary semigroup non-use value of forest resource non-vacuous non-value goods nonvanishing

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