“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	parallelizability theorem parallelizable parallelizable manifold parallelizable sphere parallelizable variety parallelization parallelization of numerical reservoir simulation parallelizing compilation parallelizing compiler parallel join parallel join algorithm parallel jurisdiction PARallel Kernels and BENCHmarks parallel-laid lapping parallel line and plane parallel lines parallellines parallel machine scheduling parallel match parallel mechanism parallel memory parallel model parallel modeling parallel molecular genetic analysis parallel momentum

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