“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	local module local moduli space local moduli theory local monodromy local monodromy matrix local monodromy representation local most powerful detector local moving frame local multiplicity of the intersection local multipoint distribution services local multipoint distribution services, LMDS local navigation local neighborhood local nilpotent ideal local non-inferior solution local noon local normality local object local office local one-parameter group local operating network bus local operation local operation and classical communication local operation and classical communication, LOCC local operations

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