“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	organic polymer flocculant organic polymer sensor organic/polymer solar cell organic polymolecular transducer organic precipitant Organic Rankine Cycle organic Rankine cycle for waste heat recovery organic reaction organic reaction mechanism organic reagent organic receptor material organic renewal organic resistive random-access memory organic ring oscillator organic scintillator organic secondary ion mass spectrometry organic self-extinguishing G-M counting tube organic semiconductor organic semiconductor doping organic semiconductor laser organic semiconductor material organic senses organic sensing material organic sensor organic shale layre

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