“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	inner bremsstrahlung inner capacity inner cell mass Inner chapter of Master Embracing Simplicity inner-city rapid rail vehicl inner cluster set inner code inner coelom inner coma inner conjugation inner-consistency of enacting inner content inner conversation inner core inner core and outer core coupling inner corona inner court actor or actress from civilian inner court eunuch actors inner derivation inner derivative inner design inner dialogue inner dilatation inner direct sum inner distance

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