“micromechanical gyroscope”的概念、定义、翻译、参考文献-科学参考

单词	micromechanical gyroscope
释义	micromechanical gyroscope Encyclopedia 工学陀螺仪释 micromechanical gyroscope微机械陀螺仪采用半导体生产中成熟的沉积、蚀刻和掺杂等工艺，将机械装置和电子线路集成在微小的硅芯片上完成，最终形成一种集成电路芯片大小的微型陀螺仪。是陀螺仪技术与微电子机械系统(MEMS)技术结合产生的新一代惯性器件。又称MEMS陀螺仪、硅微陀螺仪。
随便看	multi-element infrared detector multi-element interferometer multi-element interferometry multielement lens multi-element radio interferometer Multi-Element Radio Linked Interferometer Network multi-element radio telescope multi-end reeling Multi-energy complementary generation system multienzyme complex multi-equation multi-exciter test multiexciton complex multiexposure multiexposure, multiple exposure multiextremal multiextremal optimization problem multi-extremum problem multi-faceted communication and cooperation system in England Multi-Facility Layout multifactor multi-factor experiment multifactor experimental designs multifactorial multifactorial disorder

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