“micromechanical gyroscope”的概念、定义、翻译、参考文献-科学参考

单词	micromechanical gyroscope
释义	micromechanical gyroscope Encyclopedia 工学陀螺仪释 micromechanical gyroscope微机械陀螺仪采用半导体生产中成熟的沉积、蚀刻和掺杂等工艺，将机械装置和电子线路集成在微小的硅芯片上完成，最终形成一种集成电路芯片大小的微型陀螺仪。是陀螺仪技术与微电子机械系统(MEMS)技术结合产生的新一代惯性器件。又称MEMS陀螺仪、硅微陀螺仪。
随便看	saturated -pair saturated polarization saturated polyester saturated rubber saturated salt-water drilling fluid saturated set saturated soil saturated soil water movement saturated solution saturated solvent saturated state saturated steam turbine saturated structure saturated structured illumination microscope saturated structured illumination microscope (SSIM) saturated sublattice saturated subset saturated system saturated vapor saturated vaporization pressure hypothesis saturated vapor pressure saturated vertex saturated zone saturate magnetization saturating nonlinear systems

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