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micromechanical gyroscope
释义
micromechanical gyroscope
Encyclopedia
工学
陀螺仪
释
micromechanical gyroscope
微机械陀螺仪
采用半导体生产中成熟的沉积、蚀刻和掺杂等工艺,将机械装置和电子线路集成在微小的硅芯片上完成,最终形成一种集成电路芯片大小的微型陀螺仪。是陀螺仪技术与微电子机械系统(MEMS)技术结合产生的新一代惯性器件。又称MEMS陀螺仪、硅微陀螺仪。
随便看
structure tensor
structure theorem
structure theory
structure transport
Structure type sensor/transducer
structure vector
structure with parallelism
structuring
structurist esthetics
structurization
structurized
strucural control of coal
Struggle
Struggle between the Li Party and the Niu Party
struggle between vital qi and pathogen
Struggle for Benevolent Rule
struggle for existence
Struggle for the Root of the State
Struggles in an Ancient City
Struik
strung bamboo slips
strut
Strutinsky method
Strutt
Strutt mapping
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