“micromechanical gyroscope”的概念、定义、翻译、参考文献-科学参考

单词	micromechanical gyroscope
释义	micromechanical gyroscope Encyclopedia 工学陀螺仪释 micromechanical gyroscope微机械陀螺仪采用半导体生产中成熟的沉积、蚀刻和掺杂等工艺，将机械装置和电子线路集成在微小的硅芯片上完成，最终形成一种集成电路芯片大小的微型陀螺仪。是陀螺仪技术与微电子机械系统(MEMS)技术结合产生的新一代惯性器件。又称MEMS陀螺仪、硅微陀螺仪。
随便看	lower order lower outer density lower paraselenea lower parhelion lower plant lower Privalov operator lower process capability index lower pure value lower quartile lower radical lower radical class lower relaxation method lower Riemann integral Lower Saxony lower semi continuity lower semi-continuity lower semicontinuity lower semi continuous lower semi-continuous lower semicontinuous lower semicontinuous decomposition lower semicontinuous equivalence lower semicontinuous function lower semi continuous hull lower semi-continuous hull

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