“micro electron-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	micro electron-mechanical system
释义	micro electron-mechanical system Encyclopedia 工学微机电系统释 micro electron-mechanical system；MEMS微机电系统尺寸在微米量级到亚微米量级，集微型机构、微型传感器、微型执行器以及信号处理和控制电路直至接口、通信和电源等于一体的微型器件或系统。全称微电子机械系统。
随便看	representation of quantum state representation of residence representation of semantic categories representation of solution by complex variable functions representation of spatial relations representation of symmetric group representation of terrain representation problem representation ring representations representation section representations of a Lie algebra representations of Hilbert space representations of space representation space representation submodule representation tensor product representation theorem representation-theoretic method representation theory representation theory of groups representation type representation with continuous spectra-wave function representation with discrete spectra representation without multiplicity

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