“micro-electromechanical system sensor”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system sensor
释义	micro-electromechanical system sensor Encyclopedia 工学微电子机械系统释 micro-electromechanical system sensor微电子机械系统传感器采用微纳加工工艺，基于微电子机械系统（micro-electromechanical system; MEMS）制造的新型传感器。
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