“micro electro-mechanical system physical simulation”的概念、定义、翻译、参考文献-科学参考

单词	micro electro-mechanical system physical simulation
释义	micro electro-mechanical system physical simulation Encyclopedia 工学微机电系统分层级设计释 micro electro-mechanical system physical simulation; MEMS physical simulation微机电物理仿真在系统的物理模型上进行试验的技术。
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