“micro-electromechanical system physical sensor”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system physical sensor
释义	micro-electromechanical system physical sensor Encyclopedia 工学微电子机械系统释 micro-electromechanical system physical sensor微电子机械系统物理传感器采用微电子和微机械加工技术制造出来的，能把各种物理量转变成便于处理的电信号的传感器件。
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