“micro-electromechanical system inertial sensor”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system inertial sensor
释义	micro-electromechanical system inertial sensor Encyclopedia 工学〔惯性仪表〕释 micro-electromechanical system inertial sensor微机械惯性传感器集微型精密机械、微电子学、半导体集成电路工艺等技术于一身的惯性器件。又称微机电惯性仪表。
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