“micro-electromechanical system force sensor”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system force sensor
释义	micro-electromechanical system force sensor Encyclopedia 工学微电子机械系统释 micro-electromechanical system force sensor微电子机械系统力传感器将微小力（毫牛～纳牛）的量值转换为相关电信号的传感器件。又称微电子机械系统微小力传感器。
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