“micro-electromechanical system actuator”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system actuator
释义	micro-electromechanical system actuator Encyclopedia 工学微电子机械系统释 micro-electromechanical system actuator微电子机械系统执行器可以为微电子机械系统（micro-electromechanical system; MEMS）提供动力，也可以成为MEMS的操作和执行单元的部分。是MEMS的核心部分。
随便看	oxygen effect oxygen electrode oxygen enriched bottom blowing smelting process oxygen enriched combustion oxygen-enriched draft sintering Oxygen-enriched gasification oxygen enrichment for plateau railway station and train oxygen evolution reaction oxygen-free copper oxygen-fuel combustion flux for electric arc furnace oxygen fugacity oxygen generation based on water electrolysis oxygen group element oxygen gun brake oxygen-heat-pressure acid leaching of mineral raw material oxygenic photosynthesis oxygen in coal oxygen index oxygen inhalation Oxygen Isotope Analysis oxygenization oxygen lance oxygen-lime converter steelmaking process oxygen mask oxygen minimum zone

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