“micro-electromechanical system acoustic wave sensor”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system acoustic wave sensor
释义	micro-electromechanical system acoustic wave sensor Encyclopedia 工学微电子机械系统释 micro-electromechanical system acoustic wave sensor微电子机械系统声波传感器通过微机电加工技术制造的声波传感器。
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