“micro-electromechanical system”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system
释义	micro-electromechanical system Encyclopedia 工学封装技术释 micro-electromechanical system;MEMS微电子机械系统借助半导体制造技术加工微米尺度的微传感器、微执行器等器件，与集成电路相结合，形成信号处理与控制、机电、机械、传感集成一体化的智能系统。 Physics 凝聚态物理学特殊物相与极端条件 micro-electromechanical system, MEMS微电子机械系统
随便看	canonical curve canonical cut canonical decomposition canonical development canonical deviation canonical differential equation canonical dimension canonical distribution canonical divergence canonical divisor canonical divisor class canonical domain canonical element canonical elements canonical embedding canonical ensemble canonical epimorphism canonical equation canonical equations canonical extension canonical facotrization canonical factorization canonical field canonical flabby resolution canonical flow

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