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metal organic compound vapour phase epitaxy
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metal organic compound vapour phase epitaxy
Encyclopedia
理学
〔半导体材料〕
释
metal organic compound vapour phase epitaxy
金属有机化合物气相外延
化学气相沉积中的一种,主要反应物原料气体采用金属有机化合物。又称金属有机化合物气相沉积(MOCVD)。
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