“MEMS layout design”的概念、定义、翻译、参考文献-科学参考

单词	MEMS layout design
释义	MEMS layout design Encyclopedia 工学﹝微纳设计与仿真﹞释 MEMS layout design微机电版图设计将微机电系统（MEMS）系统级或器件级设计结果通过版图设计工具进行图形布局布线并最终产生供制造用的版图文件或版图数据的设计过程。
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