“MEMS in-situ test”的概念、定义、翻译、参考文献-科学参考

单词	MEMS in-situ test
释义	MEMS in-situ test Encyclopedia 工学微机电系统分层级设计释 MEMS in-situ test微机电在线测试测试结构或样品的制备与标准的微机电系统（MEMS）器件制造工艺完全相同的测试方法。
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