“MEMS inertial sensor”的概念、定义、翻译、参考文献-科学参考

单词	MEMS inertial sensor
释义	MEMS inertial sensor Encyclopedia 工学惯性导航释 micro-electro-mechanical system inertial sensor; MEMS inertial sensor微机械惯性传感器以集成电路和微机械加工工艺为基础的惯性传感器。工学惯性测量单元释 MEMS inertial sensor微机电惯性传感器采用微机电（MEMS）技术加工的一类惯性传感器，是MEMS器件的重要分支。
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