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MEMS inertial sensor
释义
MEMS inertial sensor
Encyclopedia
工学
惯性导航
释
micro-electro-mechanical system inertial sensor; MEMS inertial sensor
微机械惯性传感器
以集成电路和微机械加工工艺为基础的惯性传感器。
工学
惯性测量单元
释
MEMS inertial sensor
微机电惯性传感器
采用微机电(MEMS)技术加工的一类惯性传感器,是MEMS器件的重要分支。
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