“MEMS contour evolution method”的概念、定义、翻译、参考文献-科学参考

单词	MEMS contour evolution method
释义	MEMS contour evolution method Encyclopedia 工学微机电系统分层级设计释 MEMS contour evolution method微机电轮廓演化物体的形状、线条在物理或化学的条件下，由于内力或外力的作用，而随时间发生的变化称轮廓演化。
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