“MEMS accelerometer”的概念、定义、翻译、参考文献-科学参考

单词	MEMS accelerometer
释义	MEMS accelerometer Encyclopedia 工学微机电加速度计释 MEMS accelerometer微机电加速度计一种采用半导体批生产工艺加工微结构，并集成相关信号处理电路的微惯性器件。
随便看	micromutation micron micronaires value micro-nano actuation micro/nano devices micro/nano electroforming micro/nano electromechanical system micro/nano energy micro/nanofluidic chip micro/nano generator micro-nano hybrid composite micro/nano manufacturing micro/nano mechatronic micro/nano Moiré micro/nano motor micro/nano nozzle micro- nanoparticle micro/nano-photonics micro/nano piezoelectric actuation micro/nano probe micro/nano robotics micro/nanoscale measurement Micro/Nano scale phase change heat transfer micro/nanoscale thermal radiation micro/nano structure

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