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Measurement system of lithography machine
释义
Measurement system of lithography machine
Encyclopedia
工学
光刻机测量系统
释
Measurement system of lithography machine
光刻机测量系统
光刻机中用于测量硅片面高度与倾斜度、硅片与掩模对准位置、投影物镜像质测量系统。
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trigonometric-sum estimate
trigonometric system
trigonometric transformation
trigonometric weight
trigonometry
trigonometry angle
trigon/trigonid
trigonum
trigraded ring
trigram
trihapto ligand
trihedral
trihedral angle
trihedron
trihydride sulfur
triiodomethane
triiodothyronine
triisobutyl aluminium
trikaya
triketohydrindene
triketone herbicide
trilaminar germ disc
trilateral
Trilateral Commission
trilateral figure
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