“magnetron sputtering equipment”的概念、定义、翻译、参考文献-科学参考

单词	magnetron sputtering equipment
释义	magnetron sputtering equipment Encyclopedia 工学物理气相沉积技术释 magnetron sputtering equipment磁控溅射镀膜装置在真空室中利用磁控溅射技术在基片（工件）表面形成薄膜的镀膜装置，主要由真空室、真空（排气）系统、充气系统、磁控溅射源系统和控制系统组成。
随便看	heating medium station heating method of heat treatment heating mode heating of chromosphere and corona heating of concentrators heating of forging billet heating of tube blank heating oil gathering process heating or cooling curve determination heating period heating plant heating rate heating rate curve heating-rate curve heating steam pressure automatic regulating system heating surface structure heating system heating,ventilation and air conditioning of buildings heating ventilator heat instability heat-insulated brick heat insulating nonwoven heat insulating textile materials for architecture heat insulation in livestock housing heat insulation layer

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