“magnetron sputtering equipment”的概念、定义、翻译、参考文献-科学参考

单词	magnetron sputtering equipment
释义	magnetron sputtering equipment Encyclopedia 工学物理气相沉积技术释 magnetron sputtering equipment磁控溅射镀膜装置在真空室中利用磁控溅射技术在基片（工件）表面形成薄膜的镀膜装置，主要由真空室、真空（排气）系统、充气系统、磁控溅射源系统和控制系统组成。
随便看	Gibbons-Hawking多中心度规 gibbous gibbous moon Gibbs gibbs Gibbs adsorption Gibbs adsorption equation Gibbs adsorption isotherm Gibbs constant Gibbs crater Gibbs-Curie-Wulff principle Gibbs distribution Gibbs Duhem equation Gibbs-Duhem equation Gibbs Duhem relation Gibbs-Duhem relation Gibbs ensemble Gibbs ensemble Monte Carlo simulation Gibbs film Gibbs free energy Gibbs free energy criterion Gibbs free energy of activation Gibbs function Gibbs Helmholtz equation Gibbs-Helmholtz equation

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