“magnetron sputtering equipment”的概念、定义、翻译、参考文献-科学参考

单词	magnetron sputtering equipment
释义	magnetron sputtering equipment Encyclopedia 工学物理气相沉积技术释 magnetron sputtering equipment磁控溅射镀膜装置在真空室中利用磁控溅射技术在基片（工件）表面形成薄膜的镀膜装置，主要由真空室、真空（排气）系统、充气系统、磁控溅射源系统和控制系统组成。
随便看	tracking control tracking counter tracking encoded theodolite tracking error tracking IR-radiometer tracking lidar tracking loop tracking mode tracking performance tracking point tracking power tracking shot tracking system tracking telescope tracking velocity track inspection track inspection car track installation measurement track keeping track length method trackless drift trackless rubber-tyred vehicle track maintenance track of subsatellite point track of Summer Paralympics

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