“low pressure chemical vapor deposition, LPCVD”的概念、定义、翻译、参考文献-科学参考

单词	low pressure chemical vapor deposition, LPCVD
释义	low pressure chemical vapor deposition, LPCVD Physics 凝聚态物理学结构 low pressure chemical vapor deposition, LPCVD低压化学气相沉积
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