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lithography projection objectives
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lithography projection objectives
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工学
光刻投影物镜
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lithography projection objectives
光刻投影物镜
将集成电路芯片的掩模图形线条按照-0.25的微缩倍率经曝光投影后复制到硅片上的光刻机组件。是光刻机中最精密的核心部件。
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