“lithography projection objectives”的概念、定义、翻译、参考文献-科学参考

单词	lithography projection objectives
释义	lithography projection objectives Encyclopedia 工学光刻投影物镜释 lithography projection objectives光刻投影物镜将集成电路芯片的掩模图形线条按照-0.25的微缩倍率经曝光投影后复制到硅片上的光刻机组件。是光刻机中最精密的核心部件。
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