“lithography projection objectives”的概念、定义、翻译、参考文献-科学参考

单词	lithography projection objectives
释义	lithography projection objectives Encyclopedia 工学光刻投影物镜释 lithography projection objectives光刻投影物镜将集成电路芯片的掩模图形线条按照-0.25的微缩倍率经曝光投影后复制到硅片上的光刻机组件。是光刻机中最精密的核心部件。
随便看	operation of equipment in auxiliary power system operation of feed-water pump operation of fossil-fire power plant operation of higher kind operation of hydrogen cooled generator operation of interconnected power system operation of linear transformations operation of main transformer operation of multiplication operation of national economy operation of oil-fired and gas-fired boilers operation of ordinals operation of overload valve operation of plasma ignition system operation of polynomials in one variable operation of power system operation of projecting operation of pulverized coal preparation system operation of regenerative heater operation of rewriting operation of sets operation of several arguments operation of slight oil ignition operation of steam turbine oil system operation of stream turbine

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