“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	misappropriation of staff misarrangement miscalculation Miscellanea at Liaohuazhou Miscellanea at the Window Miscellanea in the Mountain Miscellanea of Prose miscellaneous Miscellaneous Anecdotes by Bi Zhongxun miscellaneous correlation miscellaneous corvee Miscellaneous Hundred and Twenty Songs Miscellaneous Morsels from Youyang - On Painting miscellaneous music melody Miscellaneous News from Guixin Street Miscellaneous Notes by the Rustic while Warming Himself under the Sun Miscellaneous Notes of Unzen Miscellaneous Notes on Calligraphy Miscellaneous Notes on Mountain and Stream Painting Miscellaneous Notes on Songs from the Music Bureau miscellaneous paintings Miscellaneous Plants Miscellaneous Poems Miscellaneous Poems by Zhang Xie Miscellaneous Poems Collected in the Jihai Year

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