“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	stress relaxation stress relaxation modulus stress relaxation of fiber stress relaxation test stress relief stress relief annealing stress relief method stress response stress restoration method stress resultant stress rupture strength stress-rupture test stress self release layer stress sensor stress space stress state stress state of segment structure stress strain curve stress-strain curve stress-strain curve of fiber stress strain relation stress-strain relation stress-strain relation of anisotropic elastic body stress-strain relationship stress-strength interference model

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