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lithography illumination system
释义
lithography illumination system
Encyclopedia
工学
光刻机照明系统
释
lithography illumination system
光刻机照明系统
为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统,介于曝光光源和投影物镜之间。
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