“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	Ts. Hasbaatar Tsha Tsha Tshe bstan sgrol ma Tshekedi Khama Tshering Wanggyal Ts. Hulan T shutter TSI Tsien Tsuen-hsuin Tsih T. Simpson T. Simpson (1710—1761) Tsimshians Tsinghua Tsinghua bamboo slips Bao Xun Tsinghua Bamboo Slips Bie Gua Tsinghua Bamboo Slips of the Warring States period Tsinghua bamboo slips Shifa Tsinghua bamboo slips Xin Shi Wei Zhong Tsinghua University Tsinghua University Art Museum Tsinghua University Library Tsinghua University Press Tsingtao beer Tsingtao Observatory, Purple Mountain Observatory,Chinese Academy of Sciences

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