“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	Preservation of historic center in Bruges Preservation of Historic Centre of Kraków preservation of leather collection preservation of length preservation of limits preservation of liquid preparations preservation of metallic collection preservation of obligation preservation of oil paintings Preservation of Old and New Towns of Edinburgh preservation of photographic data preservation of textiles Preservation of the Old City of Berne preservation & reformatting Section of American Library Association(PARS) preservation strategy preservation techniques of cultural relics preservation technology of agricultural products preservation wood preservative preservative of taxation preservative of timber structure preservative treated wood preservatize preservatory preserved context index

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