“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	Halliburton Halliburton，Erle Halling Hall, James Hall-Janko graph Hall-Janko group Hall, John Lewis Hall Jr. Hall-Littlewood polynomial Hall Littlewood polynomials Hall-Littlewood polynomials Hall mobility Hall-Montgomery constant hall of fame Hall of Five Opera Troupes Meeting Hall of Outer River Chinese Opera Troupe Hall of Peace and Happiness Hall of Saintly Mother of Jinci Memorial Temple Hall of the Bulls halloysite Hall plateau Hall platform Hall polynomial Hall probe Hall resistance

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