“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	goblet and plate of Maquis Yi of Zeng State goblet cell goblet illusion gobo go board GOCE Goclenius God god and goddess of sacrificial opera god animal mask God as Creator Godavari River Godbillon Godbillon-Vey class Goddard crater Goddard Space Flight Center Goddess Bixiayuanjun Goddess Luo River Goddess of Freedom Goddess of the River Luo in Running Script by Zhao Mengfu Godeaux Godeaux chain Godel Godel numbering Godel's completeness theorem

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