“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	Curtze curvaton curvaton inflation curvature curvature axis curvature center curvature cone curvature constant curvature correction curvature current curvature drift curvature elasticity theory curvature equation curvature field curvature flow equation curvature form curvature function curvature index curvature indicatrix curvature invariant curvature line curvature line parameter curvature matrix curvature movement curvature object

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。