“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	electron cyclotron frequency electron cyclotron maser electron cyclotron maser instability electron cyclotron oscillation electron cyclotron radiation electron cyclotron resonance electron cyclotron resonance ion thruster electron cyclotron resonant heating electron cyclotron wave electron cyclotron waves electron defect electron deficiency electron deficient electron deficient bond electron deficient [system] electron deficient system electron degeneracy electron degeneracy pressure electron density electron density function electron-density function electron detachment coefficient electron detector electron diffraction electron diffraction analysis

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