“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	investment of hydropower station investment of language human capital Investment of social medical insurance fund investment pattern of smart city investment payback period investment portfolio Investment Project Risk investment regulation investment result coefficient investments in art Investor Protection Fund Investors Relation Management investor-state arbitration to settle investment dispute inveterate invigilator invigorating heart and spleen invigorating qi for ascending invigorating qi for relieving desertion invigorating qi to check body fluid invigorating qi to control bleeding invigorating spleen for eliminating dampness invigorating spleen to reduce phlegm invigoration extra meridians invigoration of archaeus in five viscera Invincible Armada

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