“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	free ribosome free rider problem free ring free rootstock free rotation free school free Schroder path free scientific research theory in law free semester system free semigroup free set free settling free settling lamination theory free settling terminal velocity free sheaf free software Free Soil Party free space free-space correction free space laser communication free space laser propagation free space optics free space optics, FSO free space propagation model free span

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。