“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	common cycloid common denominator common detector common difference common disease-common variant common divisor common dolphinfish common ducksmeat herb Common Duct Law common edelweiss commone-document of blending XML common eigenfunction common elaeocarpus common emitter connection common envelope common envelope binary common-envelope evolution common-envelope star Common Era common establishment Common European Framework of Reference for Languages: Learning, Teaching, Assessment common evening primrose common evolvent of circle common facet common factor

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