“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	Petri net with inhibitor arc Petri polygon Petri网 Petri网模型 Petr Nikitich Tkachev Petr Nikolaevich Fedoseev Petr Nikolaevich Krasnov Petro-Canada petrochemical complex fire petrochemical industry petrochemical industry catalyst petrochemical plant fire petrochemicals petrochemical safety Petrochemical Technology petrochemical wastewater petrochemistry petrocole petrofabric petrofabrics petrogenetic grid Petroglyph in Chulut River Valley Petroglyphs within the Archaeological Landscape of Tamgaly petrographic geomorphology petrographic texture and structure

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