“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	recursive system recursive theory recursive transition network recursive transition network, RTN recursive type recursive undecidability recursive unsolvability recursive vector instruction recurvation recyclable micro-foam drilling recyclable waste recycle recycle chromatography recycled aggregate recycled aluminium recycled concrete recycled concrete structure recycled copper recycled fiber recycled lead recycled materials recycled metal metallurgy recycled nickel and cobalt recycled paper recycled polyester fiber

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