“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	collection growth collection lens collection management collection management area collection manager collection of academy Collection of Ancient and Modern Ballads collection of ancient and modern calligraphers Collection of Ancient and Modern Proverbs Collection of Ancient Prose and Poetry Collection of Anecdotes of Song People Collection of Bai Juyi's Poems collection of benchmark Collection of Bronze and Stone Inscriptions Collection of Buddhist Journals of the Republic of China Collection of Calligraphy Copybooks in Wansui Tongtian Period Collection of Cen Jiazhou Collection of Central Harmony Collection of Chen Shidao’s Talks Collection of Chen Wenzhong Collection of Chinese Modern Anti-Aggression Literature Collection of Chinese Opera from Yuan to Qing Dynasties Collection of Ci-poems in Tang and Five Dynasties Collection of Classified Tang Poetry Collection of Commentaries on Ci Poetry

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