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LIGA技术
释义
LIGA技术
Encyclopedia
工学
[传感器制造]
释
LIGA technology
LIGA技术
一种制备传感器的工艺技术。特别适合微机电系统(MEMS)传感器功能结构器件的加工。
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indicator variable
indicatrix
indicatrix ellipse
indicatrix of binormals
indicatrix of curvature
indicatrix of principal normals
indicatrix of scattering
indicatrix of tangents
indices
indices of climate extremes
indices of crystal direction
indices of crystal plane
indices of diffraction
indices of lattice direction
indices of lattice plane
indices of plane in crystal
indicia
indicial
indicial equation
indicial notation
indiction
indictment-only doctrine
indie game
indifference
indifference class
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