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laser-produced plasma light source
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laser-produced plasma light source
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laser-produced plasma light source
激光等离子体光源
激光等离子体(LPP)光源是一种高亮度、宽谱段的紫外-极紫外光源,由高功率密度的脉冲激光照射靶材,产生高温等离子体,高温等离子体激发工作原子或离子形成高激发态,高激发态粒子再向低能级跃迁过程中产生紫外-极紫外辐射。
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