“laser parameter detection”的概念、定义、翻译、参考文献-科学参考

单词	laser parameter detection
释义	laser parameter detection Encyclopedia 工学光刻光源释 laser parameter detection激光参数检测在光刻光源投入使用前，对光刻激光性能参数进行准确检测评估，并在使用过程中实时监测控制。与光刻系统成本、光刻质量、成品率、效率和设备利用率等密切相关。
随便看	indirect credit guidance indirect defense indirect demonstration indirect detection indirect differentiation indirect dipole-dipole coupling indirect discharge indirect DNA demethylation indirect drive indirect drying of mineral processing products indirect economic burden indirect economic loss from biological invasion indirect editing indirected net indirect election indirect emission indirect end labeling indirect estimation of fertility indirect estimation of population index indirect evaporative cooling air cooling unit indirect evaporative cooling water chiller indirect exchange interaction indirect exciton indirect extrusion indirect finance

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