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ion implantation doping technique
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ion implantation doping technique
Encyclopedia
工学
离子注入掺杂工艺
释
ion implantation doping technique
离子注入掺杂工艺
将加速到一定高能量的离子束注入固体材料表面层内,以改变材料表面层物理和化学性质的工艺。
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