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ion bombardment
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ion bombardment
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ion bombardment
离子轰击
使中性原子电离,通过引出电场和加速电场的作用,产生具有一定能量的带电粒子束,入射到材料的表面或进入材料内部,达到离子清洗、溅射、镀膜、离子注入等不同要求的技术。
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凝聚态物理学
结构
ion bombardment
离子轰击
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