“ion beam sputtering deposition system”的概念、定义、翻译、参考文献-科学参考

单词	ion beam sputtering deposition system
释义	ion beam sputtering deposition system Encyclopedia 工学物理气相沉积技术释 ion beam sputtering deposition system离子束溅射镀膜装置通过离子束轰击固体靶材，使溅射的粒子沉积于基材（工件）形成固体薄膜的一种真空镀膜装置，主要由真空系统、离子源、溅射靶材、控制系统等几部分组成。
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