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ion beam sputtering deposition system
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ion beam sputtering deposition system
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ion beam sputtering deposition system
离子束溅射镀膜装置
通过离子束轰击固体靶材,使溅射的粒子沉积于基材(工件)形成固体薄膜的一种真空镀膜装置,主要由真空系统、离子源、溅射靶材、控制系统等几部分组成。
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