“ion beam epitaxy”的概念、定义、翻译、参考文献-科学参考

单词	ion beam epitaxy
释义	ion beam epitaxy Encyclopedia 工学半导体外延生长释 ion beam epitaxy离子束外延在真空环境中，用含有外延生长所需元素的低能离子束在单晶衬底上生长单晶薄膜的技术。简称IBD。又称离子束淀积。
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