“hydride vapor phase epitaxy”的概念、定义、翻译、参考文献-科学参考

单词	hydride vapor phase epitaxy
释义	hydride vapor phase epitaxy Encyclopedia 工学固态光源释 hydride vapor phase epitaxy; HVPE氢化物气息外延氢化物气相外延方法是一种化学方法，利用Ⅲ族元素的氯化物和V族元素的氢化物在高温的衬底表面进行反应来制备薄膜。
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