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hydride vapor phase epitaxy
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hydride vapor phase epitaxy
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释
hydride vapor phase epitaxy; HVPE
氢化物气息外延
氢化物气相外延方法是一种化学方法,利用Ⅲ族元素的氯化物和V族元素的氢化物在高温的衬底表面进行反应来制备薄膜。
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